Price Inquiry

XY Nano Alignment Stage

  • 2D Alignment stage with resolution in nanometer range
  • Monolithic construction with EDM machining
  • High precision frictionless flexure guiding system
  • Pitch, Yaw and Roll are totally eliminated in fine tuning range
  • Driven by PZT Actuators

Resolution 0.2 nm/mV
Travel Range 25micron X 25micron at 150V DC
Weight 1.2 kg
Load Capacity 0,5 kg
Material Anodized aluminum alloy
Guiding Structure Frictionless flexure
Dimension 150mm X150mmX 23mm

China Pending
Taiwan Pending

  • Nano-metric linear drives
  • Laser cavity tuning
  • Interferometry
  • Nano-metrology
  • Fiber optic alignment
  • Wafer and mask positioning
  • Inspection systems


    This Nano-precision 2D aligning stage covers a 25 micrometer x 25 micrometer travel area. The maximum bias voltage is 150 volt DC. It is a cost effective device for people who need to align small components with a submicron or nanometer accuracy.
    1. Every positioner has been tested with Michelson interferometer qualitatively.
    2. Handle carefully, collisions or drops
    3. have a chance to damage or destroy the device.
    4. If this device is tested on the interferometer, disturbances such as thermal expansion and gradient, sound waves, vibrations, air flow, etc. should be carefully controlled.
    5. In order to observe the minor differences of the Interferograms test results, a frequency stabilized He-Ne laser source is highly recommended.

    For free test result Interferograms videos, please contact
Quick Find
Use keywords to find the product you are looking for.
Advanced Search
0 items
Manufacturer Info
Other products
Share Product
Share via E-Mail Share on Facebook Share on Twitter Share on Google Buzz Share on Digg