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Product Overview
Nano Mover is a revolutionary product(Patented in 5 country). It takes the traditional linear translation stage and modify it into a finer resolution. Unlike other nano positioning devices out on the market, our nanomover are driven by mechanical mean.

  • Translation stage with resolution in nanometer range
  • Monolithic stainless steel construction with electric discharge machining
  • High precision frictionless flexure guiding system with motion amplification
  • Pitch, yaw, and roll are totally eliminated
  • Manually driven

Resolution 40 nm/division
Travel Range 30 micrometers
Weight 1 kg (2.2 lb)
Load Capacity 3 kg (6.6 lb)
Dimension 130 mm x 66 mm x 23 mm
Material Stainless steel
Guiding Structure Frictionless flexure
Pitch, Yaw and Roll Totally eliminated

  • Nano-metric linear drives
  • Laser cavity tuning
  • Interferometry
  • Nano-metrology
  • Fiber optic alignment
  • Wafer and mask positioning
  • Inspection systems
  • Tool adjustments
  • Wear compensation

  1. Every Nano Mover has been tested with a Michelson interferometer.
  2. Handle carefully, collisions or drops have a chance to damage or destroy the device.
  3. The best working range is between 0 to 1000 divisions.
  4. If this device is tested on the interferometer, disturbances such as thermal expansion and gradient, sound waves, vibrations, air flow, etc. should be carefully controlled.
  5. In order to observe the minor differences of
  6. the interferogram test results, a frequency stablilized He-Ne laser source is highly recommended.

Test Result Video
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