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MicnoMover Mini

  • Long Travel Translation stage with resolution in nanometer range
  • Coarse Tuning combined with Fine Tuning in the same stage
  • Manually driven
  • Pitch, yaw, and roll totally eliminated

Fine Tuning Resolution 20 micron/turn
Coarse Tuning Resolution 500 micron/turn
Travel Range Up to 5 mm
Weight 0.5 kg (1.1 lb)
Load Capacity 3 kg (6.6 lb)
Material Stainless steel, or Aluminum Alloy(Black Anodized)
Guiding Structure Frictionless flexure

USPTO 7,817,890 B2
German 20 2008 013 804.3
Japan 3150389
China ZL 2008 2 0177030. X
Taiwan M 356737

  • Nano-metric linear drives
  • Laser cavity tuning
  • Interferometry
  • Nano-metrology
  • Fiber optic alignment
  • Wafer and mask positioning
  • Inspection systems

  1. Every positioner has been tested with Michelson interferometer qualitatively.
  2. Handle carefully, collisions or drops
  3. have a chance to damage or destroy the device.
  4. If this device is tested on the interferometer, disturbances such as thermal expansion and gradient, sound waves, vibrations, air flow, etc. should be carefully controlled.
  5. In order to observe the minor differences of the Interferograms test results, a frequency stabilized He-Ne laser source is highly recommended.

For free test result Interferograms videos, please contact
Test Result Video
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