Price Inquiry

Hybrid Stepper/PZT MicnoMover
[Coming Soon]

  • Long travel stage with resolution in nanometer range
  • Monolithic construction with EDM machining
  • High precision frictionless flexure guiding system
  • Pitch, Yaw and Roll are totally eliminated in fine tuning range
  • Driven by both PiezoElectric and stepping motor

Resolution About 0.2 nm/mV fine tuning
Travel Range 25 micron fine tuning
25~100 mm coarse tuning(depend on model)
Weight 1.4 kg
Load Capacity 2.0 kg
Material Anodized aluminum alloy
Dimension 150mmX150mmX23mm
Guiding Structure Frictionless flexure fine tuning, Crossed Roller coarse tuning

China Pending
Taiwan Pending

  • Nano-metric linear drives
  • Laser cavity tuning
  • Interferometry
  • Nano-metrology
  • Fiber optic alignment
  • Wafer and mask positioning
  • Inspection systems

  1. Overview
    This Motorized Alignment stage covers a 25 mm coarse tuning travel range and a 25μm fine tuning travel range. It is a motorized version of the Micno stage with a PZT actuator. The maximum bias voltage is 150 volt DC.It is a cost effective device for people who need to align components with a submicron or nanometer accuracy. With the help of this hybrid driving system, one can do 1D nanometric alignment in a 25 mm range much faster and more precisely.
  2. Every positioner has been tested with Michelson interferometer qualitatively.
  3. Handle carefully, collisions or drops
  4. have a chance to damage or destroy the device.
  5. If this device is tested on the interferometer, disturbances such as thermal expansion and gradient, sound waves, vibrations, air flow, etc. should be carefully controlled.
  6. In order to observe the minor differences of the Interferograms test results, a frequency stabilized He-Ne laser source is highly recommended.

For free test result Interferograms videos, please contact
Quick Find
Use keywords to find the product you are looking for.
Advanced Search
0 items
Manufacturer Info
Other products
Share Product
Share via E-Mail Share on Facebook Share on Twitter Share on Google Buzz Share on Digg